Smooth Top-Down Photoelectrochemical Etching of m-Plane GaN
Publication information:
Tamboli, Adele, Mathew Schmidt, Siddharth Rajan, James Speck, Umesh Mishra, Steven DenBaars, and Evelyn Hu. 2009. “Smooth Top-Down Photoelectrochemical Etching of M-Plane GaN”. JOURNAL OF THE ELECTROCHEMICAL SOCIETY 156: H47-H51. doi:10.1149/1.3005978.