Roughening hexagonal surface morphology on laser lift-off (LLO) N-face GaN with simple photo-enhanced chemical wet etching

Publication information:

Gao, Fujii, Sharma, Fujito, SP DenBaars, Nakamura, and Hu. (May) 2004. “Roughening Hexagonal Surface Morphology on Laser Lift-off (LLO) N-Face GaN With Simple Photo-Enhanced Chemical Wet Etching”. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 43: L637-L639. doi:10.1143/JJAP.43.L637.