Photoelectrochemical Undercut Etching of m-Plane GaN for Microdisk Applications
Publication information:
Tamboli, Adele, Mathew Schmidt, Asako Hirai, Steven DenBaars, and Evelyn Hu. 2009. “Photoelectrochemical Undercut Etching of M-Plane GaN for Microdisk Applications”. JOURNAL OF THE ELECTROCHEMICAL SOCIETY 156: H767-H771. doi:10.1149/1.3184156.