Large-area fabrication of TiN nanoantenna arrays for refractory plasmonics in the mid-infrared by femtosecond direct laser writing and interference lithography

Publication information:

Bagheri, S., C. Zgrabik, T. Gissibl, A. Tittl, F. Sterl, R. Walter, A. Berrier, et al. 2015. “Large-Area Fabrication of TiN Nanoantenna Arrays for Refractory Plasmonics in the Mid-Infrared by Femtosecond Direct Laser Writing and Interference Lithography”. Optical Materials Express 5 (11): 2625-33.