Fabrication of high Q square-lattice photonic crystal microcavities

Citation:

Hennessy, K, C Reese, A Badolato, CF Wang, A Imamoglu, PM Petroff, and E Hu. 2003. “Fabrication of high Q square-lattice photonic crystal microcavities.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21: 2918-2921.

Date Published:

NOV-DEC

Notes:

47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN), TAMPA, FLORIDA, MAY 27-30, 2003

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