Fabrication of high Q square-lattice photonic crystal microcavities
Publication information:
Hennessy, Reese, Badolato, Wang, Imamoglu, Petroff, and Hu. (November) 2003. “Fabrication of High Q Square-Lattice Photonic Crystal Microcavities”. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21: 2918-21. doi:10.1116/1.1629298.