@article { ISI:000247551300011,
	title = {Fabrication of suspended single crystal diamond devices by electrochemical etch},
	journal = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY B},
	volume = {25},
	year = {2007},
	month = {MAY-JUN},
	pages = {730-733},
	issn = {1071-1023},
	doi = {10.1116/1.2731327},
	author = {Wang, C. F. and Hu, E. L. and Yang, J. and Butler, J. E.}
}
