@article { ISI:000220573800016,
	title = {Fabrication of InP-based two-dimensional photonic crystal membrane},
	journal = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY B},
	volume = {22},
	year = {2004},
	note = {47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication, TAMPA, FL, MAY 27-30, 2003},
	month = {JAN-FEB},
	pages = {70-73},
	issn = {1071-1023},
	doi = {10.1116/1.1635848},
	author = {Xing, A and Davanco, M. and Blumenthal, DJ and Hu, E. L.}
}
