Citation:Xing, A, M Davanco, DJ Blumenthal, and EL Hu. 2004. “Fabrication of InP-based two-dimensional photonic crystal membrane.” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 22: 70-73.Download CitationDOI BibTex Tagged XML Date Published:JAN-FEBNotes:47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication, TAMPA, FL, MAY 27-30, 2003 DOI